The ALD20 UHP valve is the latest addition to the Swagelok family of ALD products. The patent-pending design allows for utilization of challenging low-vapor pressure precursors. The ALD20 features an ultrahigh-purity bellows to promote clean operation and higher flow capacity than other ALD valves.
In addition, the ALD20 valve can be fully thermally immersed in the gas box and heated from 50°F (10°C) up to 392°F (200°C).
| Working Pressure | Vacuum to 20 psig (1.4 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 70 to 90 psig (4.8 to 6.2 bar) |
| Temperature | 50° to 392°F (10° to 200°C) |
| Flow Coefficient (Cv) | 1.2 (MSM) or 1.7 (straight pattern) |
| Body Materials | 316L VIM-VAR or Alloy 22 |
| Bellows Material | Alloy 22 (5 μin. Ra finished) |
| End Connections | |
| Type (Size) | Female VCR® fitting (1/2 in.) Rotable male VCR fitting (1/2 in.) Tube butt weld, 0.50 in. long (1/2 in. x 0.049 in.) Modular surface-mount high-flow C-seal (1.5 in.) |
